| United States Patent | 5,808,272 |
| Sun, et. al. | Sept. 15, 1998 |
Abstract
A laser system (50) and processing method exploit a wavelength range (40) in which devices, including any semiconductor material-based devices (10) affected by conventional laser wavelengths and devices having light-sensitive or photo-electronic portions integrated into their circuits, can be effectively functionally trimmed without inducing performance drift or malfunctions in the processed devices. True measurement values of operational parameters of the devices can, therefore, be obtained without delay for device recovery, i.e., can be obtained substantially instantaneously with laser impingement. Accordingly, the present invention allows faster functional laser processing, eases geometric restrictions on circuit design, and facilitates production of denser and smaller devices.
| Inventors: | Sun; Yunlong (Portland, OR); Swenson; Edward J. (Portland, OR). |
| Assignee: | Electro Scientific Industries, Inc. (Portland, OR). |
| Appl. No.: | 959,140 |
| Filed: | Oct. 28, 1997 |
| Continuation of (including streamline cont.) Ser. No. 538,073, Oct. 2, 1995, Pat. No. 5,685,995, which is a continuation-in-part of Ser. No. 343,779, Nov. 22, 1994, Pat. No. 5,569,398. |
| Intl. Cl. : | B23K 26/00 |
| Current U.S. Cl.: | 219/121.68; 438/799 |
| Field of Search: | 219/121.68, 121.69, 121.83; 438/462, 463, 662, 799, 940 |
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