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United States Patent 5,822,211
Barenboim, et. al. Oct. 13, 1998

Laser texturing apparatus with dual laser paths having an independently adjusted parameter

Abstract

A disk texturing process uses a single pulsed laser to texture disks within a first group, which are carried through the texturing process on a first spindle assembly, and from a second group, which are carried through the texturing process on a second spindle assembly. Preferably, disks from the first group are textured alternately with disks in the second group. A first level of least one texturing parameter is stored for use only as the process is applied to disks from the first group, while a second level of the same texturing parameter is stored for use only as the process is applied to disks from the second group. These levels may be derived from measurements of textured spots made with interferometric devices forming portions of a texturing station.


Inventors: Barenboim; Michael (Boca Raton, FL); Baumgart; Peter Michael (San Jose, CA); Chrusch; Peter P. (Boynton Beach, FL); Harper; Benny Michael (Boca Raton, FL); Kami; Benjamin (San Jose, CA); Kerstens; Pieter J. M. (Boca Raton, FL); Lisanke; Michael Gerard (Boynton Beach, FL); Lu; Huizong (Coconut Creek, FL); Pena; Lanphuong Thi (Fort Lauderdale, FL); Schnetzer; Eric V. (Boynton Beach, FL); Seing; Hong S. (Boca Raton, FL); Taheri; Ali Reza (Boca Raton, FL); Tam; Andrew Ching (Saratoga, CA).
Assignee: International Business Machines Corporation (Armonk, NY).
Appl. No.: 748,642
Filed: Nov. 13, 1996
Intl. Cl. : G06F 19/00
Current U.S. Cl.: 364/474.08; 219/121.77; 219/121.82
Field of Search: 364/474.01, 474.08; 219/121.77, 121.68, 121.82, 121.78, 121.79; 427/128, 554; 360/135; 428/694 TR, 694.56

References Cited | [Referenced By]

U.S. Patent Documents
4,770,532Sept., 1988Ito 356/372
5,062,021Oct., 1991Ranjan et al. 360/135
5,108,781Apr., 1992Ranjan et al. 427/53.1
5,469,259Nov., 1995Golby et al. 356/351
5,586,040Dec., 1996Baumgart et al. 364/474.08
5,595,791Jan., 1997Baumgart et al. 427/554
5,658,475Aug., 1997Baenboim et al. 219/121.77

Other References

Instruction Manual for Model 7300 Laser Systems, Spectra-Physics Laser Diode Systems, Mountain View CA, 1990.


Primary Examiner: Gordon; Paul P.
Assistant Examiner: Garland; Steven R.
Attorney, Agent or Firm: Tomlin; Richard A., Davidge; Ronald V.
22 Claims, 10 Drawing Figures

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