| United States Patent | 5,834,731 |
| Harper | Nov. 10, 1998 |
Abstract
An apparatus for laser texturing the inner annular region of a substrate is described. The apparatus includes a Bernoulli holder for supporting the disc at a fixed distance from a support face in the holder, and a laser beam for directing a pulsed laser beam on the substrate's inner annular region. Also included is an optical assembly for varying the position of such a spot on such inner annular surface region of the substrate.
| Inventors: | Harper; Bruce M. (San Jose, CA). |
| Assignee: | HMT Technology Corporation (Fremont, CA). |
| Appl. No.: | 869,078 |
| Filed: | Jun. 4, 1997 |
| Intl. Cl. : | B23K 26/00 |
| Current U.S. Cl.: | 219/121.68; 219/121.82 |
| Field of Search: | 219/121.68, 121.69, 121.74, 121.82; 360/135; 294/64.3; 414/222, 225; 264/400 |
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Primary Examiner: Evans; Geoffrey S.
Attorney, Agent or Firm: Gorthey; LeeAnn