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United States Patent 5,844,199
Iino, et. al. Dec. 1, 1998

Conductor pattern check apparatus for locating and repairing short and open circuits

Abstract

A conductor pattern test apparatus comprises a DC voltage power source for applying a predetermined DC voltage to an end of one of a plurality of conductor patterns arranged in parallel with each other, a current measurement circuit for measuring a current flowing to another conductor pattern adjacent to the one of the conductor patterns via the end by the DC voltage power source to the end, and a short-circuit position calculation circuit for calculating a resistance value from the end to a short-circuited part of the two conductor patterns adjacent to each other, based on the current value measured by the current measurement circuit and the voltage value applied by the DC power source, and locating a position of the short-circuited part based on the calculated resistance value and a resistance value of a conductor pattern having no short-circuit. A disconnect location is also obtained.


Inventors: Iino; Shinji (c/o Operational Head Office, Tokyo Electron Limited, Fuchu NH Bldg. 2-30-7, Sumiyoshi-cho, Fuchu Tokyo 183, JP); Amemiya; Takashi (c/o Operational Head Office, Tokyo Electron Limited, Fuchu NH Bldg. 2-30-7, Sumiyoshi-cho, Fuchu Tokyo 183, JP).
Appl. No.: 796,693
Filed: Mar. 4, 1997

Related U.S. Application Data
Division of Ser No. 362,866, Dec. 23, 1994, Pat. No. 5,639,390.

Foreign Application Priority Data
Dec. 24, 1993 [JP] 5-347369
Intl. Cl. : B23K 26/00, G01R 31/02
Current U.S. Cl.: 219/121.67; 219/121.65; 219/121.68; 324/523; 324/770
Field of Search: 219/121.67, 121.68, 121.69, 121.72, 121.83, 121.65; 324/512, 522, 523, 525, 527, 770, 519, 501, 555, 754, 761, 765, 526

References Cited | [Referenced By]

U.S. Patent Documents
3,234,459Feb., 1966Brazee
3,284,704Nov., 1966Lamont
4,446,421May, 1984Berde
4,817,678Apr., 1989Dewaele 324/525 X
5,124,660Jun., 1992Cilingiroglu
5,153,408Oct., 1992Handford et al.
5,175,504Dec., 1992Henley 219/121.68 X
5,399,975Mar., 1995Laing et al.
5,639,390Jun., 1997Iino et al. 219/121.65

Foreign Patent Documents
0052290May, 1982EP
56-48559May, 1981JP
60-4802Jan., 1985JP
62-55575Mar., 1987JP
63-127167May, 1988JP 324/523
63-172973Jul., 1988JP 324/525
3-31894Feb., 1991JP
3-116012May, 1991JP 324/525
4-14929Jan., 1992JP
Primary Examiner: Mills; Gregory L.
6 Claims, 12 Drawing Figures

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