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| United States Patent |
6,437,287
|
|
Offerhaus
, et al.
|
August 20, 2002
|
Laser processing device
Abstract
There is described a laser processing device (1) whereby, by means of laser
light (6), a workpiece (4) can be processed and wherein, at the same time,
an image of the workpiece (4) to be processed is obtained, wherein the
focusing of the imaging optics is independent of the focusing of the laser
optics. The device (1) comprises a stationary laser mirror (21) and laser
focusing optics (22), which laser focusing optics (22) are axially
displaceable relative to the laser mirror (21). The device (1) further
comprises imaging optics (23) which are al axially displaceable relative
to the laser mirror (21), such that the axial distance between the laser
focusing optics (22) and the imaging optics (23) is constant.
| Inventors:
|
Offerhaus; Herman Leonard (Enschede, NL);
Kleijhorst; Richard Antonius (Enschede, NL);
van der Slot; Peter Johannes Maria (Enschede, NL)
|
| Assignee:
|
Nederlandse Centrum Voor Laser Research B.V. (NL)
|
| Appl. No.:
|
486912 |
| Filed:
|
May 5, 2000 |
| PCT Filed:
|
September 18, 1998
|
| PCT NO:
|
PCT/NL98/00543
|
| 371 Date:
|
May 5, 2000
|
| 102(e) Date:
|
May 5, 2000
|
| PCT PUB.NO.:
|
WO99/14009 |
| PCT PUB. Date:
|
March 25, 1999 |
Foreign Application Priority Data
| Current U.S. Class: |
219/121.83; 219/121.85; 219/121.6; 219/121.61; 219/121.62 |
| Intern'l Class: |
B23K 026/02 |
| Field of Search: |
219/121.83,121.85,121.6,121.61,121.62
|
References Cited
U.S. Patent Documents
| 4573467 | Mar., 1986 | Rich et al. | 128/303.
|
| 4611115 | Sep., 1986 | Rich | 250/216.
|
| 4769523 | Sep., 1988 | Tanimoto et al. | 219/121.
|
| 5382770 | Jan., 1995 | Black et al. | 219/121.
|
| 5609780 | Mar., 1997 | Freedenberg et al. | 219/121.
|
| 5698120 | Dec., 1997 | Kurosawa et al. | 219/121.
|
| 6040550 | Mar., 2000 | Chang | 219/121.
|
Primary Examiner: Elve; M. Alexandra
Attorney, Agent or Firm: Michaelson & Wallace, Michaelson; Peter L.
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