| United States Patent | 6,447,125 |
| Huonker , et al. | September 10, 2002 |
The invention relates to a device for influencing a laser beam by means of an adaptive mirror (12) in the beam path, having a piezoelectric adjusting member (17) arranged on the back of the mirror (12), it being the case that, in order to achieve low-aberration deformation of the mirror (12) for the purpose of influencing the divergence of the beam, there is provided between the adjusting member (17) and the back (24) of the mirror (12) a pressure-transmitting device (19) which acts on a large area of the deformable surface of the mirror (12).
| Inventors: | Huonker; Martin (Stuttgart, DE); Giesen; Adolf (Renningen, DE); Bea; Martin (Stuttgart, DE); Hugel; Helmut (Sindelfingen, DE) |
| Assignee: | Trumpf GmbH & Co. (DE) |
| Appl. No.: | 097912 |
| Filed: | June 16, 1998 |
| Jun 16, 1997[DE] | 197 25 353 |
| 2760407 | Aug., 1956 | Bauersfeld | 359/846. |
| 4091274 | May., 1978 | Angelbeck et al. | 359/849. |
| 4154530 | May., 1979 | Connolly, Jr. et al. | |
| 4657358 | Apr., 1987 | Anthony et al. | |
| 4831291 | May., 1989 | Ames | 359/849. |
| 4934803 | Jun., 1990 | Ealey. | |
| 5016998 | May., 1991 | Butler et al. | 359/846. |
| 5037190 | Aug., 1991 | Ealey et al. | 359/849. |
| 5074654 | Dec., 1991 | Alden et al. | 359/846. |
| 5166504 | Nov., 1992 | Protz et al. | |
| 5204784 | Apr., 1993 | Spinhirne | 359/846. |
| 5357825 | Oct., 1994 | Costello et al. | 359/849. |
| 5571430 | Nov., 1996 | Kawasaki et al. | 219/121. |
| 5777807 | Jul., 1998 | Bar et al. | 359/846. |
| 5798878 | Aug., 1998 | Asari et al. | 359/847. |
| Foreign Patent Documents | |||
| 004138557 | May., 1993 | DE | 359/846. |