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| United States Patent |
6,452,132
|
|
Fuse
|
September 17, 2002
|
Laser hole boring apparatus
Abstract
A laser hole boring apparatus comprising a galvanomirror beam scanning
system, a DOE beam diffraction system and a selecting device for the two
systems optionally. The DOE system bores many holes simultaneously on
printed circuit boards or packages by converting a laser beam into two
dimensional diffraction beams and converging the diffraction beams by an f
sin .theta. lens into spots on the object (board, package). The
galvanomirror system bores many holes sequentially on printed circuit
boards or packages by scanning a pulse laser beam in two dimensions and
converging the scanned beam by an f sin .theta. lens into a spot on the
object.
| Inventors:
|
Fuse; Keiji (Osaka, JP)
|
| Assignee:
|
Sumitomo Electric Industries, Ltd. (Osaka, JP)
|
| Appl. No.:
|
598467 |
| Filed:
|
June 22, 2000 |
Foreign Application Priority Data
| Jun 23, 1999[JP] | 11-177376 |
| May 25, 2000[JP] | 2000-154514 |
| Current U.S. Class: |
219/121.7; 219/121.73; 359/569 |
| Intern'l Class: |
B23K 026/067; B23K 026/38; G02B 005/18 |
| Field of Search: |
219/121.7,121.71,121.73,121.75
359/569,206,662
|
References Cited
U.S. Patent Documents
| 4265254 | May., 1981 | Koch et al.
| |
| 4846550 | Jul., 1989 | Schuma et al.
| |
| 5093749 | Mar., 1992 | Maeda.
| |
| 5113286 | May., 1992 | Morrison | 359/569.
|
| 5353164 | Oct., 1994 | Sasian-Alvarado.
| |
| 5362940 | Nov., 1994 | MacDonald et al. | 219/121.
|
| 5373137 | Dec., 1994 | McLaughlin.
| |
| 5481407 | Jan., 1996 | Smith et al.
| |
| 5670069 | Sep., 1997 | Nakai et al. | 219/121.
|
| 5690846 | Nov., 1997 | Okada et al. | 219/121.
|
| 5922224 | Jul., 1999 | Broekroelofs.
| |
| 6037564 | Mar., 2000 | Tatah | 219/121.
|
| Foreign Patent Documents |
| 9-89668 | Apr., 1997 | JP.
| |
| 2723798 | Nov., 1997 | JP.
| |
| 11-245070 | Sep., 1999 | JP.
| |
| WO-01/14836 | Mar., 2001 | WO.
| |
Other References
Thibault, "F-Sin(theta) lens system and applications" ,Jul.-2001,
Proceedings of SPIE, vol. 4441, pp. 98-105.
|
Primary Examiner: Evans; Geoffrey S.
Attorney, Agent or Firm: McDermott, Will & Emery
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