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United States Patent 6,455,805
Boon ,   et al. September 24, 2002

Tray mask plate for laser-trimming apparatus

Abstract

A stainless steel plate establishes a mask plate for a laser trimming tray. The plate has several openings through which laser light can be directed onto semiconductor chips borne by the tray. The plate is supported on pneumatic pistons which can raise the plate to allow a tray to be disposed underneath, and then the plate is lowered and pressed against the tray, with the weight of the plate flattening and straightening the tray to promote precise laser cuts of the chips on the tray.


Inventors: Boon; Thomas Wong Han (Singapore, SG); Min; Simon Cha Ser (Singapore, SG); Boon; Ronnie Lee Hock (Singapore, SG); Chuan; Koh Hock (Singapore, SG)
Assignee: Advanced Micro Devices, Inc. (Sunnyvale, CA)
Appl. No.: 764624
Filed: January 17, 2001

Current U.S. Class: 219/121.67
Intern'l Class: B23K 026/38
Field of Search: 219/121.67,121.68,121.69,121.7,121.71,121.72,121.85,121.86


References Cited

U.S. Patent Documents
4328410May., 1982Slivinsky et al.219/121.
5099101Mar., 1992Millerick et al.
5504301Apr., 1996Eveland219/121.
5883357Mar., 1999Newman et al.219/121.
6040094Mar., 2000Otsuka et al.428/195.
6043453Mar., 2000Arai219/121.
6172330Jan., 2001Yamamoto et al.219/121.
Foreign Patent Documents
9207313Aug., 1997JP.
11314189Nov., 1999JP.
2000288753Oct., 2000JP.

Primary Examiner: Heinrich; Samuel M.
Attorney, Agent or Firm: LaRiveiere, Grubman & Payne, LLP

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